@misc{hellin_txrf_layer_2005, 
author={Hellin, D.,Rip, J.,Delabie, A.,Bonzom, R.,Beaven, P.,De Gendt, S.,Vinckier, C.},
title={TXRF Layer Analysis for Advanced Micro-Electronic Applications: Two Case Studies- HfO2 on Si and Si on Ge},
year={2005},
howpublished = {conference poster: Budapest (H); 18.-22.09.2005},
note = {Online available at: \url{} (DOI). Hellin, D.; Rip, J.; Delabie, A.; Bonzom, R.; Beaven, P.; De Gendt, S.; Vinckier, C.: TXRF Layer Analysis for Advanced Micro-Electronic Applications: Two Case Studies- HfO2 on Si and Si on Ge. In: International Conference on Total Reflection X-Ray Fluorescence and Related Methods, TXRF 2005. Budapest (H). 2005.}}