@misc{beaven_srtxrf_analysis_2002, 
author={Beaven, P.,Schwenke, H.,Knoth, J.},
title={SR-TXRF Analysis of Contamination on Wafer Surfaces - Energy-dispersive vs. Wavelength-dispersive Systems},
year={2002},
howpublished = {conference poster: Hamburg (D); 16.-17.09.2002},
note = {Online available at: \url{} (DOI). Beaven, P.; Schwenke, H.; Knoth, J.: SR-TXRF Analysis of Contamination on Wafer Surfaces - Energy-dispersive vs. Wavelength-dispersive Systems. In: Hamburg Workshop "Application of Synchrotron Radiation in Chemistry-Status and Future". Hamburg (D). 2002.}}