@misc{schwenke_total_reflection_2002, 
author={Schwenke, H., Beaven, P., Knoth, J.},
title={Total Reflection and Grazing Emission X-Ray Fluorescence Spectrometry: Assessment of the size of Contaminant Particles on Silicon Wafer Surfaces},
year={2002},
howpublished = {book part},
note = {Schwenke, H.; Beaven, P.; Knoth, J.: Total Reflection and Grazing Emission X-Ray Fluorescence Spectrometry: Assessment of the size of Contaminant Particles on Silicon Wafer Surfaces. In: Mittal, K. (Ed.): Particles on Surfaces 7: Detection, Adhesion and Removal. 2002. 11-26.}}