@misc{weiss_potential_of_2000, 
author={Weiss, C.,Knoth, J.,Schwenke, H.,Geisler, H.,Lerche, J.,Schulz, R.,Ullrich, H.-J.},
title={Potential of Total Reflection and Grazing Incidence XRF for Contamination and Process Control in Semiconductor Fabrication},
year={2000},
howpublished = {journal article},
note = {Online available at: \url{} (DOI). Weiss, C.; Knoth, J.; Schwenke, H.; Geisler, H.; Lerche, J.; Schulz, R.; Ullrich, H.: Potential of Total Reflection and Grazing Incidence XRF for Contamination and Process Control in Semiconductor Fabrication. Mikrochimica Acta. 2000. vol. 133, no. 1-4, 65-68.}}