@misc{schwenke_a_new_1996, 
author={Schwenke, H.,Knoth, J.,Guenther, R.,Wiener, G.,Bormann, R.},
title={A new technique for depth profiling on a nanometer scale},
year={1996},
howpublished = {conference paper,conference lecture: null; null},
note = {Online available at: \url{} (DOI). Schwenke, H.; Knoth, J.; Guenther, R.; Wiener, G.; Bormann, R.: A new technique for depth profiling on a nanometer scale. In: Prokes, S.; Cammatata, R.; Christou, A. (Ed.): MRS 1995 Fall Meeting: Surface/Interface and Stress Effects in Electronic Material Nanostructures. 1996. 407-412.}}